| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5349559 | Applied Surface Science | 2017 | 5 Pages |
Abstract
Elimination of double position domains (DPDs) in epitaxial ã111ã-3C-SiC film on Si(111) substrate was conducted by laser chemical vapor deposition (LCVD) without carbonization. Transmission electron microscopy and pole figure were employed to investigate the microstructure and volume fraction of DPDs in the epitaxial layers, respectively. DPDs significantly decreased with decreasing deposition temperature (Tdep) and vanished at Tdep = 1273 K. The mechanism of the elimination of DPDs by LCVD also has been discussed.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Qingfang Xu, Peipei Zhu, Qingyun Sun, Rong Tu, Meijun Yang, Song Zhang, Lianmeng Zhang, Takashi Goto, Jiasheng Yan, Shusen Li,