| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5349645 | Applied Surface Science | 2014 | 15 Pages |
Abstract
- HCl and citric acid showed excellent oxide removal on III/V surfaces.
- Aminosilane (APTES) passivation coatings were deposited at 1-20Â nm on InAs and GaSb.
- These coatings showed high ionic nitrogen levels near the interface via XPS.
- DFT was used to find adsorption energies of APTES with and without OH groups.
- DFT modeling showed APTES-NH3+ hydrogen abstraction to form surface OH groups.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Daniel B. Knorr Jr, Kristen S. Williams, Neil F. Baril, Conan Weiland, Jan W. Andzelm, Joseph L. Lenhart, Joseph C. Woicik, Daniel A. Fischer, Meimei Z. Tidrow, Sumith V. Bandara, Nathan C. Henry,