| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5349841 | Applied Surface Science | 2014 | 14 Pages |
Abstract
As demonstrated for selected examples, the effect of optimized wet-chemical pre-treatments can be preserved during subsequent soft plasma enhanced chemical vapor depositions of Si oxides (SiOx), or amorphous materials such as Si (a-Si:H), Si nitride (a-SiNx:H), AlOx/a-SiNx and Si carbide (a-SiC:H) and enhance the energy conversion efficiency of heterojunction silicon solar cells.
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Authors
Heike Angermann,