Article ID Journal Published Year Pages File Type
5349849 Applied Surface Science 2014 25 Pages PDF
Abstract
The deposited layers were characterized by XRD analysis, nanoindentation, four probe technique and Raman spectroscopy.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Deposition and characterization of titanium carbide thin films by magnetron sputtering using Ti and TiC targets
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