| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5349853 | Applied Surface Science | 2014 | 6 Pages |
Abstract
- We determined the complexity of 3D surface roughness of aluminum nitride layers.
- We used atomic force microscopy and analyzed their fractal geometry.
- We determined the fractal dimension of surface roughness of aluminum nitride layers.
- We determined the dependence of layer morphology on substrate temperature.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Dinara Dallaeva, Åtefan Å¢Älu, Sebastian Stach, Pavel Å karvada, Pavel Tománek, LubomÃr Grmela,