High N-content a-C:N films elaborated by femtosecond PLD with plasma assistance

- Nitrogen doped amorphous carbon films were deposited by DC reactive plasma femtosecond (fs) -PLD and conventional fs-PLD.
- High nitrogen content in plasma assisted films.
- More ordered sp2 rich graphitic clusters both in terms of structural and topological order.
- Correlation length La of the clusters increases with nitrogen incorporation.
- Formation of CN bonds at the expense of CC bonds with N content.
- At the highest nitrogen concentration, terminal CN groups are incorporated in the film.
- Correlation between film composition and plasma process.