Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5350729 | Applied Surface Science | 2017 | 15 Pages |
Abstract
One can therefore control the deposition rate as well as the properties, aging and stability behaviors of the deposited coating by carefully choosing the plasma parameters.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Gaelle Aziz, Monica Thukkaram, Nathalie De Geyter, Rino Morent,