Article ID Journal Published Year Pages File Type
5351340 Applied Surface Science 2014 5 Pages PDF
Abstract

- A commercial gold precursor turned out to be useful for photolithography.
- Structures with a size down to 1 μm can be created.
- Catalytically active gold nanoparticles were formed.
- CVD led to patterned silicon nanowire growth.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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