Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5351340 | Applied Surface Science | 2014 | 5 Pages |
Abstract
- A commercial gold precursor turned out to be useful for photolithography.
- Structures with a size down to 1 μm can be created.
- Catalytically active gold nanoparticles were formed.
- CVD led to patterned silicon nanowire growth.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Britta Kämpken, Martina Heinrich, Thaleia Vavaleskou, Norbert Auner, Andreas Terfort,