| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5351362 | Applied Surface Science | 2014 | 27 Pages |
Abstract
Structure characterization of Sb/B4C multilayers for soft X-ray optics with a layers thickness from 0.5Â nm to 7Â nm is reported for the first time. Sb/B4C coatings were manufactured via magnetron sputtering. Amorphous and crystalline phases of the layers and the multilayer structure parameters were characterized with the X-ray diffraction data and the TEM data. The Sb/B4C multilayers demonstrated long term stability of their parameters and performances. The reached value of the reflectance of the Sb/B4C multilayers is 19-28% measured at the near-normal incidence in the wavelength range of 6.64-8.5Â nm. The influence of reduced Sb density on the reflectivity is discussed.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
I.A. Kopylets, V.V. Kondratenko, E.N. Zubarev, D.L. Voronov, E.M. Gullikson, E.A. Vishnyakov, E.N. Ragozin,