Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5351626 | Applied Surface Science | 2014 | 4 Pages |
Abstract
- In-process measurement of laser-induced effects on the electrical device properties.
- Optimization of the laser scribing parameters with low influence of side effects.
- High parallel resistance of laser scribes was achieved.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
X. Wang, M. Ehrhardt, P. Lorenz, C. Scheit, S. Ragnow, X.W. Ni, K. Zimmer,