| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5352319 | Applied Surface Science | 2013 | 4 Pages |
Abstract
- Evolution of step-terrace structure of c-plane sapphire substrates irradiated with low-pressure air plasma was studied with AFM.
- Ten minutes irradiation causes pairing of neighboring terraces into alternating wider and narrower terraces.
- Steps roughening and terrace etching occur after 20Â min irradiation.
- Thirty minutes irradiation creates “step-terrace free” morphology with etched pits which are stable against annealing.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Dan Zhang, Yang Gan,