| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5352334 | Applied Surface Science | 2013 | 7 Pages |
Abstract
- The thermal stability of IrO2 films was strongly dependent on the oxygen pressure and annealing temperature.
- The PLD-IrO2 films had a higher stability than the previous reported results.
- The thermal stability was almost consistent with thermodynamic calculation.
- IrO2 films were found to be stable up to 923Â K under oxygen pressure of 1Â Pa.
- The room-temperature resistivity of IrO2 films showed a value of 49-58 μΩ cm at PO2 = 1 Pa.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Yansheng Gong, Chuanbin Wang, Qiang Shen, Lianmeng Zhang,