Article ID Journal Published Year Pages File Type
5352396 Applied Surface Science 2013 6 Pages PDF
Abstract

- Arc discharge lithography produced by a metal tip was used to modify Zn3N2 thin films.
- Properties of resultant layers were examined by SEM, IBA and resistivity measurements.
- At higher voltage discharges, IBA confirmed Zn3N2 was transformed into ZnO:N crystals.
- Dimensions of submicron ZnO:N crystals was similar than initial Zn3N2 grain domains.
- Different stoichiometry between ZnO and Zn3N2 formed Zn droplets along the scan edges.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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