| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5352516 | Applied Surface Science | 2016 | 5 Pages |
Abstract
NbC crystalline films have been deposited in vacuum by ultra-short pulsed laser deposition technique. The films have been characterized by transmission and scanning electron microscopies and by X-ray diffraction. To clarify the ablation-deposition mechanism, the plasma produced by the ablation process has been characterized by optical emission spectroscopy and fast imaging. A comparison of the results with those obtained by ns pulsed deposition of the same target has been carried out.
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Authors
M. Sansone, A. De Bonis, A. Santagata, J.V. Rau, A. Galasso, R. Teghil,