Article ID Journal Published Year Pages File Type
5352645 Applied Surface Science 2013 4 Pages PDF
Abstract

- We present an interference lithography technique for the surface texturing of Si.
- Regular honeycomb structures are fabricated on poly-Si without using a mask.
- Uniform textures are obtained with a minimum reflectance of 10%.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Fabrication of honeycomb texture on poly-Si by laser interference and chemical etching
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