Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5352850 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⺠Quantitative optical simulation of thin film with sub-monolayer resolution ⺠Relationship between MSE and AoI for SE data by FDTD ⺠Addressed and solve problems (e.g. artifact resonance in bloch boundary condition (BBC)) in achieving quantitative optical modeling at large AoI of 70°.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
King Tai Cheung, Yishu Foo, Chap Hang To, Juan Antonio Zapien,