Article ID Journal Published Year Pages File Type
5352850 Applied Surface Science 2013 6 Pages PDF
Abstract
► Quantitative optical simulation of thin film with sub-monolayer resolution ► Relationship between MSE and AoI for SE data by FDTD ► Addressed and solve problems (e.g. artifact resonance in bloch boundary condition (BBC)) in achieving quantitative optical modeling at large AoI of 70°.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Towards FDTD modeling of spectroscopic ellipsometry data at large angles of incidence
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