| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5352851 | Applied Surface Science | 2013 | 9 Pages |
Abstract
⺠The essence of medium energy ion scattering (MEIS) for nanolayer analysis is given. ⺠MEIS is applied to characterise high-k nanolayers and (DRAM) multilayer structures. ⺠MEIS is shown to give quantitative composition depth profiles and layer thicknesses. ⺠MEIS is shown to identify the nature & extent of layer intermixing and segregation.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
J.A. van den Berg, M.A. Reading, P. Bailey, T.Q.C. Noakes, C. Adelmann, M. Popovici, H. Tielens, T. Conard, S. de Gendt, S. van Elshocht,