Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5352869 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠Deposited nanocrystalline diamond films on silicon substrate. ⺠Developed multilayer optical models. ⺠Determined film thickness, optical properties from ellipsometry.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
T. Lohner, P. CsÃkvári, P. Petrik, G. Hárs,