Article ID Journal Published Year Pages File Type
5353264 Applied Surface Science 2013 6 Pages PDF
Abstract
► The effect of pulse-repetition frequencies (PRFs) on the properties of BST films has investigated. ► A 50 nm amorphous BST layer is observed at film-substrate interface in the films grown at 10 Hz. ► The effective dielectric constant of bulk, amorphous layers has been extracted.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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