Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5353268 | Applied Surface Science | 2013 | 4 Pages |
Abstract
⺠Single phase Ba(Mg1/3Ta2/3)O3 and Ba(Zn1/3Ta2/3)O3 films grown by RF-PLD method on Pt-coated silicon substrates. ⺠Highly textured BXT thin films with cubic perovskite structure and low surface roughness were achieved. ⺠Unlike targets, the BXT films exhibit positive values of the temperature coefficient of the dielectric permittivity. ⺠BaMg1/3Ta2/3O3 and BaZn1/3Ta2/3O3 thin films with dielectric constant of about 22.5 and 25, respectively have been obtained.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
L. Nedelcu, N.D. Scarisoreanu, C. Chirila, C. Busuioc, M.G. Banciu, S.I. Jinga, M. Dinescu,