Article ID Journal Published Year Pages File Type
5353268 Applied Surface Science 2013 4 Pages PDF
Abstract
► Single phase Ba(Mg1/3Ta2/3)O3 and Ba(Zn1/3Ta2/3)O3 films grown by RF-PLD method on Pt-coated silicon substrates. ► Highly textured BXT thin films with cubic perovskite structure and low surface roughness were achieved. ► Unlike targets, the BXT films exhibit positive values of the temperature coefficient of the dielectric permittivity. ► BaMg1/3Ta2/3O3 and BaZn1/3Ta2/3O3 thin films with dielectric constant of about 22.5 and 25, respectively have been obtained.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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