Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5353301 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠UV laser induced periodic surface structures (LIPSS) on semiconductors. ⺠Fabricated LIPSS are perpendicular to the laser polarization direction. ⺠LIPSS period is of the order of the irradiation wavelength. ⺠Fluence and number of pulses needed for LIPSS formation increase with bandgap. ⺠Semiconductor surface temperature upon laser irradiation was estimated.
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Authors
Mikel Sanz, Esther Rebollar, Rashid A. Ganeev, Marta Castillejo,