Article ID Journal Published Year Pages File Type
5353404 Applied Surface Science 2014 5 Pages PDF
Abstract
The electrical and morphological properties of magnesium oxide (MgO)/alumina (Al2O3) bilayered thin films prepared by electron beam evaporation at oblique incidence are reported. The MgO thin films are deposited when the incline angle is 55° on various Al2O3 thin films incline angles. A columnar grain with a roofing-tile-shaped surface is observed in these MgO/Al2O3 thin films. X-ray pole figures and θ-2θ scan, ω-scan are used to characterize in-plane and out-of-plane textures. The relationships between ω-FWHM, capacitor, leakage current, and the inclined angles are studied. The morphology is investigated by using scanning electron microscope (SEM). So the oblique angle deposition method is an effective way to control the microstructure of thin films.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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