Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5353557 | Applied Surface Science | 2013 | 13 Pages |
Abstract
⺠We evaluated many reported methods for cleaning sapphire substrates using comprehensive surface analysis techniques. ⺠We found that reported methods did not perform well in terms of removing both organic and particulate contaminants. ⺠We proposed a new wet-cleaning method showing outstanding performance for cleaning sapphire substrates.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Dan Zhang, You Wang, Yang Gan,