Article ID Journal Published Year Pages File Type
5353581 Applied Surface Science 2014 5 Pages PDF
Abstract

- It is difficult to deposit Al2O3 thin films on pristine graphene directly.
- H2O pulses pretreatment can enhance the Al2O3 coverage on pristine graphene.
- Uniform Al2O3 thin films can grow on the graphene after dipping pretreatment.
- No defects are produced in graphene after dipping pretreatment.
- It is easier to deposit Al2O3 on CVD graphene than exfoliated graphene.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
A facile way to deposit conformal Al2O3 thin film on pristine graphene by atomic layer deposition
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