| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5353709 | Applied Surface Science | 2016 | 10 Pages |
Abstract
- Spherical and non-spherical colloidal silica particle size and shape were characterized.
- Non-spherical colloidal silica slurry exhibits higher MRR during CMP.
- Wide PSD of non-spherical colloidal silica slurry can further increase MRR.
- Non-spherical colloidal silica and conventional alumina-silica slurry were compared.
- Lower surface roughness and lower surface defects with no TA embedded alumina.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Sideq Salleh, Izman Sudin, Arobi Awang,