Article ID Journal Published Year Pages File Type
5353769 Applied Surface Science 2013 6 Pages PDF
Abstract
▸ Preparation method was used as filtered vacuum arc (FVA) deposition. ▸ Ternary coating obtained by using single carbon source with TMS gas. ▸ Detailed discussion of chemical nature for these coating by using XPS.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Synthesis and characterization of Ti-Si-C-N nanocomposite coatings prepared by a filtered vacuum arc method
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