| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5353770 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⸠The effects of CF4 plasma on ZnO-CNT core-shell structures were studied. ⸠ZnO was effective in protecting the aligned CNTs core for as long as 30 min of plasma etching. ⸠SEM showed the surface morphology was nearly similar between pristine, 2 min and 30 min plasma etched specimens. ⸠F was observed to displace O in ZnO. ⸠This is the first report of an ultra long plasma etch of fluorine onto ZnO surface.
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Authors
H.Y. Wang, Daniel H.C. Chua,