Article ID Journal Published Year Pages File Type
5353782 Applied Surface Science 2013 4 Pages PDF
Abstract
▸ The specific resistivity of ITO was enhanced by H2 + O2 mixed gas plasma treatment. ▸ The transmittance was same as that of untreated ITO after plasma treatment. ▸ The process was carried out at room temperature without any step of post-treatment.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Effects of H2/O2 mixed gas plasma treatment on electrical and optical property of indium tin oxide
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