Article ID Journal Published Year Pages File Type
5353821 Applied Surface Science 2013 4 Pages PDF
Abstract
▸ Mechanical stresses in PECVD silicon carbonitride films are mainly intrinsic. ▸ Volume changes in growing film correlate with PECVD mechanism. ▸ CTE and Young's modules of silicon carbonitride films are calculated.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane
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