| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5353835 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⸠Polysilazane based silica thin films (290 nm) grown on multilayer structures of different ultra-thin barriers (UTBs) on silicon substrates were studied. ⸠The oxide local structure was studied in terms of SiOSi bridges by FTIR spectroscopy. ⸠The substrate-silica interfaces and the presence of defects were studied by means of steady state and time resolved luminescence. ⸠The analysis revealed the presence of dioxasilirane, Si(O2), and silylene, Si:, defect centers in the samples grown on silicon nitride UTB.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Pier Carlo Ricci, Gianluca Gulleri, Francesco Fumagalli, Carlo Maria Carbonaro, Riccardo Corpino,