| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5353838 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⸠Novel combination of SIMS and SPM for accurate 3D chemical mapping. ⸠Different removal rates of metallurgical phases by ion beam. ⸠Faster oxidation rate of silicon vs. aluminum at room temperature in vacuum.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Chuong L. Nguyen, Tom Wirtz, Yves Fleming, James B. Metson,