Development of an opto-hydrodynamic process to remove nanoparticles from solid surfaces

▸ A pulsed micro-liquid jet can be produced by using the optical breakdown of a micro droplet. ▸ The speed of laser-induced micro liquid jet is up to 1600 m/s. ▸ Nanoscale contaminants are removed by the direct impingement of the micro liquid jet and the resultant surface flows. ▸ 10 nm alumina particles on the Si substrate are completely removed.