Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5354007 | Applied Surface Science | 2013 | 4 Pages |
Abstract
⺠LIPSS on silicon wafer was made in air and in ethanol environment. ⺠Ethanol environment produce cleaner surface ripples. ⺠Ethanol environment decrease spatial wavelength of the LIPSS by 30%. ⺠More number of pulses produce smaller spatial wavelength in air. ⺠Number of pulses do not influence spatial wavelength in ethanol environment.
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Authors
L.S. Jiao, E.Y.K. Ng, H.Y. Zheng,