| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354021 | Applied Surface Science | 2013 | 9 Pages |
Abstract
⺠The impact of the porous silica clusters on a silicon substrate was studied by MD. ⺠The porous cluster shows high MRR and low surface damage at an optimal pore size. ⺠The high MRR is due to the combined effects of plough, adhesion and permeation. ⺠The low surface damage is due to the decreasing of the penetration depth. ⺠Enlarged contact area is more effective than increased penetration to enhance MRR.
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Authors
Ruling Chen, Ranran Jiang, Hong Lei, Min Liang,