Article ID Journal Published Year Pages File Type
5354030 Applied Surface Science 2013 6 Pages PDF
Abstract
► The multilayer DLC films with different modulation ratios have been fabricated by FCVA. ► The multilayer DLC films can effectively decrease the residual stress of the DLC films. ► The multilayer DLC film with modulation ratio of 1:1 shows the best wear resistance.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
The microstructure and mechanical properties of multilayer diamond-like carbon films with different modulation ratios
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