| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354051 | Applied Surface Science | 2013 | 9 Pages |
Abstract
⺠Spatial homogeneity and nitridation of a nanopattern template were studied by SPELEEM. ⺠The template exhibited a global inhomogeneity concerning the individual nanopatterns. ⺠The nanopatterns were diminished, more corrugated and faceted after nitridation. ⺠The nitridated Al nanodots were structurally ordered but differently orientated. ⺠The nitridation removed the fluorocarbon sidewalls of the nanopatterns.
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Physical and Theoretical Chemistry
Authors
B. Qi, S. Ãlafsson, A.A. Zakharov, M. Göthelid, B. Agnarsson, H.P. Gislason,