| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354078 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠We report on the deposition of perovskite La2Ti2O7 and LaTiO2N films. ⺠The films were grown by reactive sputtering from an oxynitride target. ⺠The presence of residual water allowed the deposition of oxide films. ⺠Abrupt changes in deposition rate and nitrogen contents of films were observed.
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Authors
Y. Lu, C. Le Paven-Thivet, R. Benzerga, L. Le Gendre, A. Sharaiha, F. Tessier, F. Cheviré,