Article ID Journal Published Year Pages File Type
5354094 Applied Surface Science 2013 8 Pages PDF
Abstract
► The use of pulse bias was effective in suppressing the formation of particles. ► The adhesion of pulse-biased films was improved compared with that of dc-biased films. ► The friction coefficients of Si-N-DLC films were as low as those of Si-DLC films. ► The tribological properties were improved by the use of pulse bias.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition
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