Article ID Journal Published Year Pages File Type
5354409 Applied Surface Science 2015 5 Pages PDF
Abstract
The phase-change performance of WxSb3Te material were systemically investigated by in situ resistance-temperature measurement, X-ray diffraction (XRD), Raman scattering, adhesive strength test and transmission electron microscope (TEM) in this paper. Experimental results show that the thermal stability of Sb3Te was increased significantly with W doping. XRD and TEM results prove that the incorporation of W plays a role in suppressing the crystallization of Sb3Te films, causing smaller grain size. Furthermore, the adhesive strength between W electrode and phase-change material was increased obviously by W addition and a relatively rapid SET/RESET operation of 10 ns is realized with large sensing margin.
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Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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