| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354438 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⺠We demonstrated ultrashort pulse laser parallel processing using diffractive beam-array generated by binary Dammann gratings. ⺠The beam-array machined holes had high uniformity (hole diameter variation <4%) by slightly defocusing the 0-th order. ⺠Parallel surface patterning of ITO with periodic structures was demonstrated using the beam array.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zheng Kuang, Walter Perrie, Dun Liu, Stuart P. Edwardson, Yao Jiang, Eamonn Fearon, Ken G. Watkins, Geoff Dearden,