| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354479 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠A Zn2SiO4 film was grown on silicon nanoporous pillar array (Si-NPA) for humidity detection. ⺠Zn2SiO4/Si-NPA humidity sensor showed high sensitivity, quick response and slight hysteresis. ⺠Zn2SiO4/Si-NPA might be a promising material for fabricating practical humidity sensors.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Wen Chuang Wang, Yong Tao Tian, Kun Li, Er Yang Lu, Dong Shang Gong, Xin Jian Li,