Article ID Journal Published Year Pages File Type
5354497 Applied Surface Science 2013 6 Pages PDF
Abstract
► Ti adsorption on a bare Si(1 1 1) surface. ► Ti forms polar covalent bonds with Si atoms on the surface. ► At low temperature, a stable TiSi monolayer is formed by Ti deposition on the Si(1 1 1) surface. ► Remaining Si-Si bonds in the TiSi interface play an important role for the Ti diffusion on the Si(1 1 1) surface.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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