Article ID Journal Published Year Pages File Type
5354516 Applied Surface Science 2013 6 Pages PDF
Abstract
► The substrate properties must be considered for the analysis of FTIR-ATR spectra. ► Band assignment depends strongly on the used FTIR measurement mode. ► FTIR-ATR spectroscopy is powerful for the study of thin film molecular organisation. ► Townsend DBD leads to more ordered SiOxHy layers than filamentary DBD.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
FTIR-ATR spectroscopy in thin film studies: The importance of sampling depth and deposition substrate
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