Article ID Journal Published Year Pages File Type
5354521 Applied Surface Science 2013 6 Pages PDF
Abstract
► The dependence of films properties on different incident energies was investigated. ► The compressive stress originated from the decrease of both bond angles and lengths. ► The growth mechanism was clarified based on the atomic motion mechanism.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Structural properties and growth evolution of diamond-like carbon films with different incident energies: A molecular dynamics study
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