Article ID Journal Published Year Pages File Type
5354537 Applied Surface Science 2016 8 Pages PDF
Abstract

- Contact resistance between conductive AFM tip and different metals is investigated.
- FIB processed Ti and Cr areas have larger resistance than as deposited films.
- Gold displays low and ohmic tip-sample resistance even after FIB processing.
- Au/Ti stack on top of ZnO pillars allows reliable I-V characterization by C-AFM.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Electrical characterization of FIB processed metal layers for reliable conductive-AFM on ZnO microstructures
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