Article ID Journal Published Year Pages File Type
5354737 Applied Surface Science 2012 4 Pages PDF
Abstract
► Initial reaction mechanism between BDEAS and Si (0 0 1) surface was investigated. ► Adsorption configuration affects adsorption energy and reaction energy barrier. ► Adsorption energy should be higher than reaction energy barrier for ALD reaction.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Adsorption and surface reaction of bis-diethylaminosilane as a Si precursor on an OH-terminated Si (0 0 1) surface
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