Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5354737 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠Initial reaction mechanism between BDEAS and Si (0 0 1) surface was investigated. ⺠Adsorption configuration affects adsorption energy and reaction energy barrier. ⺠Adsorption energy should be higher than reaction energy barrier for ALD reaction.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Seung-Bin Baek, Dae-Hee Kim, Yeong-Cheol Kim,