| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354743 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠The experimental setup for the removal of nanoparticles using plasma shockwaves formed by a femtosecond pulsed laser. ⺠Removal of PSL nanoparticles from the silicon wafer surface as a function of the gap distance and particle counting. ⺠The removal efficiency of the nanoparticles reached 95% without surface damage when the gap distance was 150 μm.
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Authors
Jung-Kyu Park, Ji-Wook Yoon, Sung-Hak Cho,