| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354765 | Applied Surface Science | 2012 | 8 Pages |
Abstract
⺠ZnO:Ga transparent electrode films by pulsed DC magnetron sputtering. ⺠Synergistic contribution of sputtering power and temperature in combination. ⺠100 nm-thick film fulfilled required properties with improvement margins. ⺠Dopant Ga as electron donor and carrier suppressor deactivating oxygen vacancy. ⺠Necessity of careful control of doping efficiency for optimal properties.
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Authors
Sanghun Lee, Dongkeun Cheon, Won-Jeong Kim, Moon-Ho Ham, Woong Lee,