| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354766 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠A fluorinated self-assembled monolayer (SAM) is used as an antisticking layer in NIL. ⺠We formed the antisticking layer with the 0.5 nm uniformity via stamp tilt and rotation. ⺠To enhance durability, we treated the stamp surface before and after treatment. ⺠We identified that the durability of antisticking layer was dramatically improved.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Moon Jae Lee, Sang Uk Cho, Sang Mae Lee, Chang Seok Kim, Myung Yung Jeong,