| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354771 | Applied Surface Science | 2012 | 7 Pages |
Abstract
⺠CNx coatings were successfully prepared using a hybrid coating process with the combination of RF PECVD and DC magnetron co-sputtering of graphite target at different N2/Ar flow ratios. ⺠The structural properties of CNx coating were greatly affected by the N2/Ar flow ratio. ⺠Friction coefficients of CNx coatings in air and N2 gas stream showed less dependency on the N2/Ar flow ratio. ⺠The friction behaviors of CNx coatings are mainly controlled by the tribo-films on the mating surfaces.
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Authors
Pengfei Wang, Takanori Takeno, Koshi Adachi, Hiroyuki Miki, Toshiyuki Takagi,